Powered by OpenAIRE graph
Found an issue? Give us feedback
addClaim

Vertically supported microresonators

Authors: K.B. Lee; L. Lin;

Vertically supported microresonators

Abstract

Vertically supported, comb-shape microresonators with the feasibility of actuation in two perpendicular directions have been demonstrated. The microstructure is made of 2-/spl mu/m thick polysilicon by a standard surface micromachining process and is vertically lifted and fixed with the assistance of locking springs and micro hinges. With DC bias voltage of 10V and AC driving voltage of 10V, peak-to-peak, under atmospheric pressure, the resonator vibrates in parallel to the comb finger direction at 7.75 kHz with measured amplitude of 3.3 /spl mu/m and quality factor of 67. When actuated in the direction normal to the surface of comb finger, the resonator vibrates at 2 kHz with vibration amplitudes of 11.2 /spl mu/m and 10.5 /spl mu/m, respectively for the two opposite, comb-shape microstructures. The potential applications of these vertically supported microresonators are in the areas of MOEMS (Micro-opto-electro-mechanical Systems) devices such as optical systems on a chip.

Related Organizations
  • BIP!
    Impact byBIP!
    selected citations
    These citations are derived from selected sources.
    This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    1
    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    Average
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    Average
    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    Average
Powered by OpenAIRE graph
Found an issue? Give us feedback
selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
1
Average
Average
Average
Upload OA version
Are you the author of this publication? Upload your Open Access version to Zenodo!
It’s fast and easy, just two clicks!