CMOS integrated infrared sensor

D.T. Chang; D.M. Chen; F.H. Lin; W.J. Kaiser; O.M. Stafsudd

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https://doi.org/10.1109/sensor...

Article . 2002 . Peer-reviewed

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https://dx.doi.org/10.1109/sen...

Article

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CMOS integrated infrared sensor

descriptionPublicationkeyboard_double_arrow_right Article 22 Nov 2002Publisher:IEEEJournal:Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97), volume 2, pages 1,259-1,262

Authors: D.T. Chang; D.M. Chen; F.H. Lin; W.J. Kaiser; O.M. Stafsudd;

doi: 10.1109/sensor.1997.635464

CMOS integrated infrared sensor

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Abstract

CMOS integrated microsensors (CIMS) technology has been developed that combines bulk micromachining, pyroelectric materials and a commercial CMOS process to provide an integrated infrared sensor. This sensor system is based on a new sol-gel derived thin film fabricated on thin silicon micro electromechanical structure. The sensor has a peak responsivity of 2.33 V/W and a thermal time constant of 300 ms.

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University of California, Los Angeles
United States

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