
RF MEMS are small mechanical devices fabricated by photolithographic processes, which are used for elemental signal processing functions in rf and microwave frequency circuits. The most common RF MEMS control component is a microwave transmission line switch, currently under development for applications requiring low insertion loss, high linearity, moderate switching speeds, and low to moderate power. The RF MEMS switch promises integration onto a variety of substrates, including substrates bearing active semiconductor devices. This paper will discuss some aspects of the operation of RF MEMS switches and how they may be inserted into microwave circuitry to best advantage.
| selected citations These citations are derived from selected sources. This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | 21 | |
| popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network. | Average | |
| influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | Top 10% | |
| impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network. | Top 10% |
