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Micro-machined resonant accelerometer with high sensitivity

Authors: Junbo Wang 0002; Yanlong Shang; Sheng Tu; Lei Liu; Deyong Chen;

Micro-machined resonant accelerometer with high sensitivity

Abstract

A resonant accelerometer with high sensitivity, fabricated through MEMS bulk-silicon processes, is proposed in this paper. The external acceleration can be transferred into the frequency shift of the resonant beams which is double-clamped by the proof mass and the anchor. To improve the sensitivity of the accelerometer, a micro leverage force amplifying mechanism is adopted, from which the transformation efficiency between the external acceleration and the axial stress of the resonant beam would be improved obviously. MEMS bulk-silicon processes were used on single one wafer to fabricate the sensor chip. The electromagnetic excitation and detection was used to make the closed-loop control of the sensor easier. Experimental results show that the Q-factor of the resonant beam is about 450 and the sensitivity of the accelerometer is about 1900Hz/g.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
5
Average
Average
Average
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