Powered by OpenAIRE graph
Found an issue? Give us feedback
addClaim

High-Aspect Ratio Metallic Nano Grippers

Authors: Jeongsoo Lee; Daniel S. Park; Arun K. Nallani; Yonghao Cui; Aidan Skoyles; J-B. Lee;

High-Aspect Ratio Metallic Nano Grippers

Abstract

We report the fabrication and characterization of a submicron metallic electrothermal gripper using a combination of electron beam (e-beam) lithography and electroplating techniques. An SU-8 layer was used as a sacrificial layer and polymethyl methacrylate (PMMA) resist was patterned using e-beam lithography to create ~3:1 aspect ratio (1 mum thick, 350 nm critical feature width) mold for electroplating. Nickel was electroplated and resist layers were removed to make the device suspended. The submicron gripper was characterized using a nanomanipulator installed in a dual-beam focused ion beam system. The jaw closing up to 1.39 mum with an applied current of 28 mA has been reproducibly observed, which is corresponding to the maximum power consumption of 11.2 mW. Finite element analysis (FEA) using ANSYS was performed and the FEA results showed a good agreement with the measured results.

Related Organizations
  • BIP!
    Impact byBIP!
    selected citations
    These citations are derived from selected sources.
    This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    5
    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    Average
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    Average
    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    Average
Powered by OpenAIRE graph
Found an issue? Give us feedback
selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
5
Average
Average
Average
Upload OA version
Are you the author of this publication? Upload your Open Access version to Zenodo!
It’s fast and easy, just two clicks!