Silicon Nitride Echelle Grating Spectrometer for Operation Near 1.55μm

We present an e-beam written Si 3 N 4 /SiO 2 Echelle Grating (EG) with a silver coated reflector. The EG exhibits a 1.4 dB on-chip loss, a spectral resolution power of ∼1300, and more than 30dB signal-to-noise ratio. Crosstalk mechanism is also analyzed in this paper.

Related Organizations

University of Maryland, College Park
United States
University of Sydney
Australia
University of Maryland, College Park
United States

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