Modeling of the small-signal equivalent circuit of SOI FinFETs through SPICE simulations is presented. A compact model implemented in Verilog-A predicts well the DC characteristics of RF SOI FinFETs and allows the extraction of the intrinsic conductance, transconductance and capacitances at any selected operating point. The intrinsic small-signal equivalent circuit composed of those extracted lumped elements is used in SPICE simulator. This paper compares the parameters extracted from both DC and wideband S-parameter methods.