Microprocessing of MEMS gyroscopes

Lyudmila I. Dolgovykh; Sergey S. Evstafyev

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https://doi.org/10.1...arrow_drop_down

https://doi.org/10.1109/eiconr...

Article . 2018 . Peer-reviewed

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https://dx.doi.org/10.1109/eic...

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Microprocessing of MEMS gyroscopes

descriptionPublicationkeyboard_double_arrow_right Article 01 Jan 2018Publisher:IEEEJournal:2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus)

Authors: Lyudmila I. Dolgovykh; Sergey S. Evstafyev;

doi: 10.1109/eiconrus.2018.8317407

Microprocessing of MEMS gyroscopes

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Abstract

Application of laser radiation for materials microprocessing is widely used in various fields of science and technology today. The paper discusses the possibility of balancing the elements of MEMS gyroscope by using exposure for laser radiation. As a result of studying the parameters of the laser modification of silicon.

Related Organizations

National Research University of Electronic Technology
Russian Federation

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