
This paper presents a novel scheme on the integration of chip-scale SERF magnetometer using a verticalcavity surface-emitting laser(VCSEL) as pumping and detecting laser. The fabrication and integration process of the whole system based on stacking PCB boards consist of VCSEL, optical components, rubidium vapor cell, photo-detector, three axis Helmholtz coils. By calculation and measurement, it was found that the module is designed with a minimum output power of 0.15mW and a competitive volume of 1.4×1.4×2.5cm3. Experiments show that the sensitivity of chip-scale SERF magnetometer based on VCSEL is around 1.87pT/Hz1/2 in magnetic shield environment, the integration and miniaturization design process of the magnetometer can be empolyed for magnetoencephalography(MEG) measurement.
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