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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Archivio della ricer...arrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
https://doi.org/10.1109/ectc.2...
Article . 2013 . Peer-reviewed
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New selective wet processing

Authors: BALUCANI, Marco; D. Ciarniello; NENZI, Paolo; D. Bernardi; CRESCENZI, Rocco; KHOLOSTOV, KONSTANTIN;

New selective wet processing

Abstract

A new selective processing technique based on a confined dynamic liquid drop\meniscus is presented. This approach is represented by the localized wet treatment of silicon wafers using dynamic liquid drop that while is in contact with the wafer forms a dynamic liquid meniscus. The main scientific innovation and relevance introduced by this work have been applied to industrial solar cell production and on silicon wafer metal bumps formation for the IC interconnection (i.e. copper pillars). Such new technique allows to touch in specific defined positions the silicon wafer in order to perform any kind of wet processing (e.g. etching, cleaning and/or plating) without the need of any protective resist. To investigate on pendant dynamic liquid drops and dynamic liquid meniscus use of computational fluid dynamic technique (i.e. numerical techniques to accurately predict fluid flows) was followed and is presented. An experimental setup has been built to validate the calculations. Numerical results showed a good agreement with experimental ones. Prototypes heads, using stereo-lithography systems, were developed and localized selective plating without the need of lithography step was performed on silicon.

Country
Italy
Keywords

confined dynamics; copper pillars; ic interconnections; industrial solar cells; numerical results; numerical techniques; processing technique; selective platings

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    selected citations
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    This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    5
    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    Average
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    Top 10%
    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    Top 10%
Powered by OpenAIRE graph
Found an issue? Give us feedback
selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
5
Average
Top 10%
Top 10%
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