New design tools and automation strategies are neededto create robust, cost-effective, and manufacturable micro-machineddevices and systems. Some of the design automationissues include mixed-technology simulation, materialproperty prediction in the micron-size regime, self-consistencyin coupled electromechanical devices, integratedmodeling environment, micro-fluid modeling, and synthesisof device geometries and process flows. Advancement inthese areas will path the way to full-scale maturity of theMEMS field.