Mass Sensor Based on Thin Film Bulk Acoustic Resonator

descriptionPublicationkeyboard_double_arrow_right Article , Conference object 01 Jan 2009Publisher:IEEEJournal:2009 2nd International Conference on Biomedical Engineering and Informatics

Authors: Biyan Wu;

doi: 10.1109/bmei.2009.5305157

Mass Sensor Based on Thin Film Bulk Acoustic Resonator

- Summary
- Metrics

Abstract

A mass sensor based on thin film bulk acoustic resonator (FBAR) is submitted in this paper. This sensor is fabricated by standard MEMS process as back-etch structure and its resonator curve is measured by Agilent Vector network analyer. The results show that this sensor's Q factor is above 610 and resonance frequency is about 1608MHz. This FBAR sensor is applied as humidity sensor. The reproducibility of this sensor’ S11and Q factor are evaluated.

Related Organizations

Zhejiang Gongshang University
China (People's Republic of)

Impact byBIP!

	selected citations These citations are derived from selected sources. This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).	0
	popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.	Average
	influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).	Average
	impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.	Average