
In this paper, a free space based method for measurement of silicon dielectric constant is presented at W band frequencies. The dielectric constant of silicon is calculated using measured phase information of the transmitted signal (S21) through Silicon sheet of 500um thickness. Measured dielectric constant for silicon wafer has numerous fluctuations which come from multiple reflection and diffraction effect due to sharp edges.
TK7800-8360 Electronics
TK7800-8360 Electronics
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