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Building two-dimensional lattices in semiconductor quantum-wells offers the prospect to design distinct energy-momentum dispersions, including conical intersections and nondispersive bands. Here, we compare three lithographic patterning methods, e-beam lithography, block copolymer lithography and thermal scanning probe lithography to produce a honeycomb lattice in an In0.53Ga0.47As quantum well. We weigh up the pros and cons of each method to reach lattice constants smaller than 20 nm with a minimum of dispersion in the pore size.
Scattering, honeycomb, InGaAs, Quantum wells, III-V semiconductors, Lithography, In0.53Ga0.47As, [SPI] Engineering Sciences [physics], Nanoperforation, two-dimensional lattices, Lattices
Scattering, honeycomb, InGaAs, Quantum wells, III-V semiconductors, Lithography, In0.53Ga0.47As, [SPI] Engineering Sciences [physics], Nanoperforation, two-dimensional lattices, Lattices
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