Silicon-micromachined gas chromatography system used to separate and detect ammonia and nitrogen dioxide. II. Evaluation, analysis, and theoretical modeling of the gas chromatography system

descriptionPublicationkeyboard_double_arrow_right Article 01 Jan 1994Publisher:Institute of Electrical and Electronics Engineers (IEEE)Journal:Journal of Microelectromechanical Systems, volume 3, pages 147-154 (issn: 1057-7157,

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Authors: E.S. Kolesar; R.R. Reston;

doi: 10.1109/84.338635

Silicon-micromachined gas chromatography system used to separate and detect ammonia and nitrogen dioxide. II. Evaluation, analysis, and theoretical modeling of the gas chromatography system

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Abstract

A miniature gas chromatography (GC) system was designed and developed using silicon micromachining and integrated circuit (IC) processing techniques. The MMGC system can separate parts-per-million (ppm) ammonia and nitrogen dioxide concentrations in less than 30 minutes when isothermally operated (80/spl deg/C) at 40 psi. The heat of adsorption of nitrogen dioxide (0.38 eV) on a CuPc thin film (0.2 /spl mu/m thick) was also independently established. As a result of the MMGC system's performance evaluation, several of the assumptions invoked in the initial design were re-investigated, and a refined technique for optimizing the MMGC system's operation and performance was developed. >

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