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Physical Review B
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Physical Review B
Article . 2014 . Peer-reviewed
License: APS Licenses for Journal Article Re-use
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Energy-loss- and thickness-dependent contrast in atomic-scale electron energy-loss spectroscopy

Authors: Tan, Haiyan; Zhu, Ye; Dwyer, Christian; Xin, Huolin;

Energy-loss- and thickness-dependent contrast in atomic-scale electron energy-loss spectroscopy

Abstract

Atomic-scale elemental maps of materials acquired by core-loss inelastic electron scattering often exhibit an undesirable sensitivity to the unavoidable elastic scattering, making the maps counterintuitive to interpret. Here, we present a systematic study that scrutinizes the energy-loss and sample-thickness dependence of atomic-scale elemental maps acquired using 100-keV incident electrons in a scanning transmission electron microscope. For single-crystal silicon, the balance between elastic and inelastic scattering means that maps generated from the near-threshold $\mathrm{Si}\ensuremath{-}L$ signal (energy loss of 99 eV) show no discernible contrast for a thickness of $0.5\ensuremath{\lambda}$ ($\ensuremath{\lambda}$ is the electron mean-free path, here approximately 110 nm). At greater thicknesses we observe a counterintuitive ``negative'' contrast. Only at much higher energy losses is an intuitive ``positive'' contrast gradually restored. Our quantitative analysis shows that the energy loss at which a positive contrast is restored depends linearly on the sample thickness. This behavior is in very good agreement with our double-channeling inelastic scattering calculations. We test a recently proposed experimental method to correct the core-loss inelastic scattering and restore an intuitive ``positive'' chemical contrast. The method is demonstrated to be reliable over a large range of energy losses and sample thicknesses. The corrected contrast for near-threshold maps is demonstrated to be (desirably) inversely proportional to sample thickness. Implications for the interpretation of atomic-scale elemental maps are discussed.

Country
Germany
Keywords

info:eu-repo/classification/ddc/530

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
4
Average
Top 10%
Average
Green
hybrid