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Lirias
Article . 2020
Data sources: Lirias
Applied Physics Letters
Article . 2020 . Peer-reviewed
Data sources: Crossref
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Defect profiling in FEFET Si:HfO2 layers

Authors: B. J. O'Sullivan; V. Putcha; R. Izmailov; V. Afanas'ev; E. Simoen; T. Jung; Y. Higashi; +11 Authors

Defect profiling in FEFET Si:HfO2 layers

Abstract

Ferroelectric Si-doped HfO2 is a promising candidate for future generation memory devices. However, such devices are vulnerable to significant threshold voltage shifts resulting from charge trapping in oxide defects. We use complementary characterization and modeling techniques to reveal significant electron trapping/de-trapping behavior, together with a strong temperature dependence of the electron emission kinetics in ferroelectric layers, which results from the onset of polarization of the ferroelectric layer. This can lead to an apparent difference in the defect characteristics in ferroelectric-HfO2 compared to the paraelectric-HfO2 structures they are shown to closely resemble when this contribution is decoupled. The results demonstrate the presence of a defect band closely aligned to the silicon conduction band, which can easily be accessed during device operation.

Country
Belgium
Keywords

Science & Technology, 02 Physical Sciences, Physics, 09 Engineering, Physics, Applied, 10 Technology, Physical Sciences, 51 Physical sciences, Applied Physics, 40 Engineering

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    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    Top 10%
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    Top 10%
    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    Top 10%
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
30
Top 10%
Top 10%
Top 10%
Green
bronze