Phase sensitive scanning optical microscope

descriptionPublicationkeyboard_double_arrow_right Article , Other literature type 15 Oct 1984 English Publisher:AIP PublishingJournal:Applied Physics Letters, volume 45, pages 846-848 (issn: 0003-6951, eissn: 1077-3118,

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Authors: P. C. D. Hobbs; R. L. Jungerrran; G. S. Kino;

doi: 10.1063/1.95422 , 10.1117/12.949734

Phase sensitive scanning optical microscope

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Abstract

An electronically scanned optical microscope which quantitatively measures amplitude and phase is described. The system is insenstive to mechanical vibrations. The phase infromation makes it possible to measure surface height variations with an accuracy of better than 100 Å and can also be used to improve the lateral resolution.

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Stanford University
United States

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