Diatomic versus atomic secondary ion emission

descriptionPublicationkeyboard_double_arrow_right Article 15 Sep 1975 English Publisher:AIP PublishingJournal:Applied Physics Letters, volume 27, pages 318-320 (issn: 0003-6951, eissn: 1077-3118,

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Authors: Wittmaack, K.; Staudenmaier, G.;

doi: 10.1063/1.88484

handle: 11858/00-001M-0000-0028-B7EE-A

Diatomic versus atomic secondary ion emission

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Abstract

The yield ratio of diatomic versus atomic secondary ion emission from metals and semiconductors has been studied using two different mass spectrometers. Under ultrahigh vaccum conditions and with argon primary ions, yield ratios in excess of unity were observed for a variety of elements at secondary ion energies below about 10 eV.

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Max Planck Society
Germany
Max Planck Institute for Plasma Physics
Germany

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