
arXiv: 1107.3170
We demonstrate micromechanical reflectors with a reflectivity as large as 99.4% and a mechanical quality factor Q as large as 7.8 × 105 for optomechanical applications. The reflectors are silicon nitride membranes patterned with sub-wavelength grating structures, obviating the need for the many dielectric layers used in conventional mirrors. We have employed the reflectors in the construction of a Fabry-Perot cavity with a finesse as high as F = 1200, and used the optical response to probe the mechanical properties of the membrane.
Condensed Matter - Mesoscale and Nanoscale Physics, Mesoscale and Nanoscale Physics (cond-mat.mes-hall), FOS: Physical sciences, Physics - Optics, Optics (physics.optics)
Condensed Matter - Mesoscale and Nanoscale Physics, Mesoscale and Nanoscale Physics (cond-mat.mes-hall), FOS: Physical sciences, Physics - Optics, Optics (physics.optics)
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