A time domain spectrometer in the range of 0.5–2 THz was used for time of flight (ToF) measurements of THz pulses for imperfection detection in non metallic materials. The measurements were performed in comparison to the established ultra sound pulse echo (PE) and time of flight diffraction (ToFD) technique. No coupling agent and no contact to the surface is required for THz ToFD measurements. Plastic test specimen with notches, voids and drilled side holes were used to study reflected and diffracted response signals. No major differences were observed between the UT and THz ToFD records for the first surface of the notches, voids and holes. Additionally to the UT records also signals were obtained from its back side and a second raw of holes. The THz measurement is fast and has the potential to substitute UT applications in some industrial areas. Within the German project “Handheld” the potential for miniaturization of the time domain equipment is explored for efficient application.