
We report experimental results for electron scattering from tetrafluoroethylene, C2F4, obtained from measurements in two laboratories. An extensive set of differential, integral, and momentum transfer cross sections is provided for elastic scattering for incident electron energies from 1 to 100 eV and inelastic (vibrational excitation) scattering for incident electron energies at 3, 6, 7.5, 8, and 15 eV, and for scattering angles ranging from 10° to 130°. To highlight the role of intermediate negative ions (resonances) in the scattering process we have also measured excitation functions for elastic scattering and vibrational excitation of the ground electronic state of C2F4 for incident energies between 1.5 and 20 eV. Our results are compared with recent theoretical calculations and a limited number of other experimental results.
Ground state, Extrapolation, Data acquisition, Tetrafluoroethylenes, Fluorine, Keywords: Chemical vapor deposition, Dielectric materials, Ethylene, Electron affinity, Semiconductor doping, Kohn variational techniques, Electron scattering, Elastic scattering
Ground state, Extrapolation, Data acquisition, Tetrafluoroethylenes, Fluorine, Keywords: Chemical vapor deposition, Dielectric materials, Ethylene, Electron affinity, Semiconductor doping, Kohn variational techniques, Electron scattering, Elastic scattering
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