Modified arc ion source of multicharged ions of metals and gases

descriptionPublicationkeyboard_double_arrow_right Article 01 Feb 1998 English Publisher:AIP PublishingJournal:Review of Scientific Instruments, volume 69, pages 849-851 (issn: 0034-6748, eissn: 1089-7623,

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Authors: B. P. Il’enko; I. M. Nekludov; I. N. Onishchenko;

doi: 10.1063/1.1148643

Modified arc ion source of multicharged ions of metals and gases

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Abstract

In the ion source described here, a heated 1500 °C discharge chamber was used and a special configuration of crossed E×B fields, thereby providing several times more ion-beam current. The design of this multicharged ion source has been developed to work for long periods and use moderate power in continuous operation.

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