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Schottky and ohmic contacts to SiC

Authors: C.-M. Zetterling; S.-K. Lee; M. Östling;

Schottky and ohmic contacts to SiC

Abstract

This chapter covers Schottky (rectifying barrier) and ohmic (nonrectifying, no barrier) contacts to SiC. There are a few devices such as the MESFET and the Schottky diode that actually need Schottky contacts. However, for most devices ohmic contacts are preferred between a metal and semiconductor. To understand the formation of ohmic contacts, the theory for Schottky contacts is needed, and it is therefore covered first in this chapter. The formation methods are similar for both contact types, and are covered mainly in the section on Schottky contacts. The only way to know if a contact is good enough is to measure its electrical characteristics, and therefore electrical characterisation methods are covered in detail for both contact types.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
2
Average
Average
Average
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