Powered by OpenAIRE graph
Found an issue? Give us feedback
downloadFull-Text
image/svg+xml art designer at PLoS, modified by Wikipedia users Nina, Beao, JakobVoss, and AnonMoos Open Access logo, converted into svg, designed by PLoS. This version with transparent background. http://commons.wikimedia.org/wiki/File:Open_Access_logo_PLoS_white.svg art designer at PLoS, modified by Wikipedia users Nina, Beao, JakobVoss, and AnonMoos http://www.plos.org/ University of Florid...arrow_drop_down
image/svg+xml art designer at PLoS, modified by Wikipedia users Nina, Beao, JakobVoss, and AnonMoos Open Access logo, converted into svg, designed by PLoS. This version with transparent background. http://commons.wikimedia.org/wiki/File:Open_Access_logo_PLoS_white.svg art designer at PLoS, modified by Wikipedia users Nina, Beao, JakobVoss, and AnonMoos http://www.plos.org/
University of Florida: Digital Library Center
Article . 2011
License: CC BY NC ND
Full-Text: http://ufdc.ufl.edu/LS00543864/00001
Data sources: Bielefeld Academic Search Engine (BASE)
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
Scripta Materialia
Article . 2011 . Peer-reviewed
License: Elsevier TDM
Data sources: Crossref
https://dx.doi.org/10.1016/j.s...
Article
Data sources: Microsoft Academic Graph
University of Central Florida (UCF): STARS (Showcase of Text, Archives, Research & Scholarship)
Article . 2011
Data sources: Bielefeld Academic Search Engine (BASE)
 View all 1 versions
Claim

Boron clustering in implanted NiSi

descriptionPublicationkeyboard_double_arrow_right Article 01 May 2011 United States English Publisher:Elsevier BVJournal:Scripta Materialia, volume 64, pages 828-831 (issn: 1359-6462, Copyright policy )
Authors: A. Portavoce; I. Blum; D. Mangelinck; K. Hoummada; L. Chow; V. Carron; J.L. Lábár;

doi: 10.1016/j.scriptamat.2011.01.015

Boron clustering in implanted NiSi

Abstract

B redistribution in a B-implanted polycrystalline NiSi layer has been investigated using atom probe tomography and secondary ion mass spectrometry. The B accumulations observed at the SiO2/NiSi interface and in the NiSi bulk are due to B clustering. B cluster formation at these two locations is shown to have a major impact upon the entire B distribution observed after annealing. The formation of B clusters in the NiSi bulk may be due to implantation-related defects.

Country
United States
Related Organizations
View all View all
Keywords

Multidisciplinary, DOPANTS, Materials Science, Implantation, DIFFUSION, Ni-suilcides, SILICIDED METAL GATES, Cluster, SEGREGATION, Metallurgy & Metallurgical Engineering, Nanoscience & Nanotechnology, Boron

  • BIP!
    Impact byBIP!
    selected citations
    These citations are derived from selected sources.
    This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    		 7
    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    		 Average
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    		 Average
    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    		 Top 10%
Powered by OpenAIRE graph
Found an issue? Give us feedback
selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
7
Average
Average
Top 10%
Green
Related to Research communities
UArctic