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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Microelectronics Rel...arrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
Microelectronics Reliability
Article . 2005 . Peer-reviewed
License: Elsevier TDM
Data sources: Crossref
DBLP
Article . 2022
Data sources: DBLP
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Image alignment for 3D reconstruction in a SEM

Authors: Pintus R; PODDA, SIMONA; VANZI, MASSIMO;

Image alignment for 3D reconstruction in a SEM

Abstract

In a previous paper [1] a procedure to extract the third dimension from back-scattered electron has been proposed. The 3D recovery process involves the acquisition of four images and the computation of surface gradients; thus, a specific algorithm finds the depth map of the given surface. The image acquisition process may require or specific instrumentation (4-sector, independent channel axial BS detector), or very standard SEM configuration and specimen rotation/translation. In this last case an alignment procedure should be developed, which results troublesome because of the different image shadowing. The paper deals with an alignment method based on the parallel acquisition of the BS images and of their respective uniformly shaded twins obtained by the specimen current detector, or by the standard annular axial BS detector.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
6
Average
Top 10%
Average
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