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Microelectronic Engineering
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Microelectronic Engineering
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Microelectronic Engineering
Article . 2017
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Quantitative AC - Kelvin Probe Force Microscopy

Authors: Kohl, Dominik; Mesquida, Patrick; Schitter, Georg;
APC: 3,019.54 EUR

Quantitative AC - Kelvin Probe Force Microscopy

Abstract

This paper presents a novel feedback based Scanning Probe Microscopy method which enables quantitative surface potential measurements without the need of the DC bias of Kelvin Probe Force Microscopy. In addition to the sinusoidal excitation signal at frequency , a sinusoidal signal with the frequency 2 is applied to the conductive cantilever. By modulating the amplitude of the signal at 2, the resulting electric force component at the frequency can be nullified by a feedback controller. When the force and, hence, the cantilever oscillation is zero, the required amplitude represents the quantitative surface potential. Recording this amplitude while scanning over the sample allows to acquire a two dimensional map of the surface potential. The AC-KPFM method, shown analytically and with experimental results, keeps the compensation based principle of classical KPFM, resulting in quantitative measurements but without the need of a DC bias.

Country
United Kingdom
Keywords

KPFM, SPM, DC free, Surface potential, AFM, Electrical and Electronic Engineering, Condensed Matter Physics, 530, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Surfaces, Coatings and Films

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    16
    popularity
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    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
16
Top 10%
Average
Top 10%
Green
hybrid