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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Microelectronic Engi...arrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
Microelectronic Engineering
Article . 2008 . Peer-reviewed
License: Elsevier TDM
Data sources: Crossref
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Fabrication of miniaturized Schottky emitter by wire electrical discharge machining (WEDM)

Authors: A.K. Dokania; M. Pelle; P. Kruit;

Fabrication of miniaturized Schottky emitter by wire electrical discharge machining (WEDM)

Abstract

The Schottky emitter is extensively used in scanning electron beam lithography machines because of its high brightness and stable current. For its use in parallel electron beam lithography to increase the throughput, we are investigating the possibility of creating an array of miniaturized Schottky emitters. This paper discusses a novel method of fabricating a miniaturized Schottky emitter of 1mm diameter by wire-electro discharge machining (WEDM). Various WEDM process parameters were optimized for better reproducibility and surface finish of the fabricated emitter. The fabricated samples match well with the intended input design, with no visible stress or bending. Joule heating in vacuum shows good operational feasibility and temperature stability. After heating, the tip becomes as sharp as conventional Schottky emitters. The miniaturized emitter operates at a relatively low power.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
7
Average
Average
Average
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