Abstract In this paper, a modular design process is applied for the design of a micro motion actuator. This procedure of the modular design consists of functional analysis, module selection and module analysis, simulation, experimental test and evaluation. The independence of the functional requirements is used to analyze the module function of the actuator in the functional analysis. In module selection and module analysis, a mechanism module was designed by a pseudo-rigid-body model (PRBM) and the design was realized from pseudo-rigid-body model to the compliant mechanism. An electromagnetic force module investigated electromagnetic force from the different design parameters and the force could be obtained from a non-uniform magnetic field and symmetrical structural design. The simulation can provide information for setup of the experimental instrument, so that through experimental testing and evaluation, the module design could be modified. For this modular design process, a low cost and high performance of the micro motion actuator would be realized.