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Journal of Crystal Growth
Article . 2007 . Peer-reviewed
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The influence of free-carrier concentration on the PEC etching of GaN: A calibration with Raman spectroscopy

Authors: Jan L. Weyher; Jan L. Weyher; R. Lewandowska; R. Lewandowska; John J. Kelly; Boleslaw Lucznik; Leszek Konczewicz;

The influence of free-carrier concentration on the PEC etching of GaN: A calibration with Raman spectroscopy

Abstract

Large areas of electrically active regions of in-homogeneities have been revealed by the electroless photo-etching (PEC) method in GaN layers grown by the hydride vapor phase epitaxy (HVPE) technique. Variations in the local etch rate have been correlated with the variations in the free-carrier concentrations as determined by micro-Raman spectroscopy. The etch rate decreased linearly with the log of the carrier concentration. The latter could change by more than two orders of magnitude on the same sample.

Country
Netherlands
Keywords

Applied Materials Science

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    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    Top 10%
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citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
31
Top 10%
Top 10%
Top 10%
Green
bronze
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