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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Applied Surface Scie...arrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
Applied Surface Science
Article . 2019 . Peer-reviewed
License: Elsevier TDM
Data sources: Crossref
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Overcoming the insulating materials limitation in HiPIMS: Ion-assisted deposition of DLC coatings using bipolar HiPIMS

Authors: V. Tiron; E.-L. Ursu; D. Cristea; D. Munteanu; G. Bulai; A. Ceban; I.-L. Velicu;

Overcoming the insulating materials limitation in HiPIMS: Ion-assisted deposition of DLC coatings using bipolar HiPIMS

Abstract

Abstract The present study aims to demonstrate that operating the HiPIMS discharge in bipolar regime (BP-HiPIMS) enables an energy-enhanced deposition process of high-quality hydrogen-free DLC thin films (high hardness, low coefficient of friction, good wear resistance, good adherence to the substrate and very low surface roughness). The structural and mechanical properties of DLC thin films deposited using the BP-HiPIMS technique were compared to those of the films prepared using a conventional HiPIMS process, under various deposition conditions. The BP-HiPIMS technique generates an energetic ion population and a substantial increase in the ion flux as compared to the conventional (monopolar) HiPIMS. This phenomenon overcomes the limitations when working with insulating or high electrical resistivity materials (both substrates and coatings), i.e. the need to accelerate the film-forming species. Energetic enhanced deposition conditions during bipolar HiPIMS facilitate the densification (up to 2.7 g/cm3) of amorphous carbon thin films which results in an increase in the film hardness (23 GPa) when depositing on Si substrates, without using substrate bias voltage, adhesion interfacial layer or substrate pre-treatment. Besides high hardness, the BP-HiPIMS process allows growing DLC coatings with good elastic strain to failure and high resistance to plastic deformation and cracking.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
62
Top 1%
Top 10%
Top 10%
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