Abstract ZnO/ZnS bilayer antireflection coatings have been prepared by spray pyrolysis using aqueous solutions of zinc acetate and thiourea or zinc chloride and thiourea. The structure, surface morphology, chemical composition and optical transmittance of the bilayer have been examined as a function of the composition of the initial solution. X-ray photoelectron spectroscopy analysis and Ar ion-beam sputter etching was carried out to obtain a depth profile of bilayer. Neither carbon nor other by-products, which could alter the optical transmittance of the bilayer were found in either the interface or bulk. The differences between the bilayers arise from the annealing of the ZnS underlayer, as well as the precursor used to prepare it.