Abstract Spatially resolved ion-atom emission intensity ratios for Sr, Ca, Mg, Cd and Zn have been measured at rf power settings of 1.00, 1.25, 1.50, 1.75 and 2.0 kW at a vertical height of 16 mm above the load coil. Measured values of electron density have been used to construct a theoretical local thermal equilibrium (LTE) framework, and ion-atom emission intensity ratios calculated from this framework have been compared to experimentally measured values. The measured ion-atom emission intensity ratios were found to be within an order of magnitude of these calculated LTE ratios. The experimental degree of ionization for these five elements was determined for the various rf input powers. These values have been compared to the analagous LTE values. Both degree of ionization and departure from LTE were found to be strongly correlated with the ionization potential of the element. The radial spatial dependence of the degree of ionization for Cd at an rf power of 1.25 kW has been measured for aerosol flow rates of 0.6, 0.8 and 1.21 m−1 for vertical heights of 4, 8, 12, 16 and 20 mm above the load coil. The spatial distribution of electron number density was measured at an rf power of 1.25 kW and at aerosol flow rates of 0.6, 0.8 and 1.21 m−1 and a correlation between degree of ionization and electron density identified. Finally the relative concentration of Cd ions has been calculated from ion spatial emission profiles and plasma operating conditions which produce a maximum in the ion density identified.