LIGA and LIGA-like processing with high energy photons

descriptionPublicationkeyboard_double_arrow_right Article 01 Mar 1995Publisher:Springer Science and Business Media LLCJournal:Microsystem Technologies, volume 2, pages 153-156 (issn: 0946-7076, eissn: 1432-1858,

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Authors: H. Guckel;

doi: 10.1007/s005420050034 , 10.1007/bf02739549

LIGA and LIGA-like processing with high energy photons

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Abstract

High energy X-rays, in the present case photons near 20,000 eV, can be used in LIGA-like processing. Heating problems with this type of photon flux can be avoided by proper filtration via transmission filters. The exposure of PMMA with high energy photons leads to cost effective exposures with full cost recovery estimates of $0.10 per square centimeter at 200 μm photoresist thickness. The cost advantage originates from increased PMMA absorption lengths and the ability to fabricate large area masks without diaphragms which permit large exposure fields.

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