Powered by OpenAIRE graph
Found an issue? Give us feedback
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Microsystem Technolo...arrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
Microsystem Technologies
Article . 2006 . Peer-reviewed
License: Springer TDM
Data sources: Crossref
versions View all 1 versions
addClaim

This Research product is the result of merged Research products in OpenAIRE.

You have already added 0 works in your ORCID record related to the merged Research product.

Production cell for laser joining of microsystems with modular “Pick and Join” tools

Authors: PopraweR.; BosseL.; BogleaA.;

Production cell for laser joining of microsystems with modular “Pick and Join” tools

Abstract

The ongoing trend in the Microtechnology field reflects a further increase of the product miniaturization and in the same time shortened lifetime cycles. These aspects are the basis for the development of new packaging and interconnection concepts with increased efficiency and reliability. The state-of-the-art to control and monitor crucial process steps includes the use of human operators generating this way high personnel costs. Combining flexible mounting and joining tools with progressive process monitoring strategies new production facilities can be established. Following this concept a semi-automatic prototype production cell for packaging and interconnection of optical and electro-optical microsystems has been developed. In order to prove the performances of the prototype production cell the mounting and assembly of cuboid shape components, consisting of optical transparent or semi-conducting materials, has been defined as demonstrative application. The joined cuboids have the contact surface precisely delimited in functional and joining area. The particularities of the joining area (small dimensions and limited access) and the well-known advantages of the laser material processing make the laser beam soldering the most suitable joining process for this application.

  • BIP!
    Impact byBIP!
    citations
    This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    3
    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    Average
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    Top 10%
    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    Average
Powered by OpenAIRE graph
Found an issue? Give us feedback
citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
3
Average
Top 10%
Average
Upload OA version
Are you the author of this publication? Upload your Open Access version to Zenodo!
It’s fast and easy, just two clicks!