The authors propose that a variant of the activation method based on charged particles be used to study the distribution of diffused lithium in the bulk of a silicon crystal; in this method the radioactive nuclide /sup 7/Be (T/sub 1/2/ = 53.3 days, E/sub ..gamma../ = 477 keV) is formed as a result of the /sup 6/Li(d, n)/sup 7/Be and /sup 7/Li(d,2n)/sup 7/Be reactions in natural lithium. As the initial crystal they used n-type silicon of resistivity 10-300 Omega x cm and dislocation density < 10/sup 4/ cm/sup -2/; metallic lithium was evaporated onto the surface of the crystal in a vacuum (10/sup -3/ Pa). After the evaporation the crystal was heated to 500-600/sup 0/C, after which it was held at that temperature 2 h and slowly cooled. The prepared samples were irradiated for 10 h with a beam of 16-MeV deuterons. After 10 days the activity of the irradiated samples was measured with a spectrometer using a Ge(Li) detector.