Modification and functionalization of substrates can lead to the presence at materials surfaces of molecular nanostructures. Their 2D packing and chemical functionalities may impart to surfaces particular properties that can be very different from the pristine ones. Modification is a very general term concerning every kind of treatment leading to change the physical morphology or surface chemistry of a given material in order to obtain tailored properties with dependence on the material application field. Functionalization is mainly related to the introduction at a surface of chemical groups with a variable surface density which are requested to subsequently react with other species. When a process or a group of processes are applied to the surface of an inorganic or organicmaterial, affecting both topography/morphology and surface chemistry at the micro- and/or nanoscale level, the material surface results physically and chemically patterned. In the following the main modification, functionalization, and patterning surface techniques will be described according to process methods, substrate chemistry, and nanotechnological application fields