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Advanced Electronic Materials
Article . 2020 . Peer-reviewed
License: CC BY
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Advanced Electronic Materials
Article
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Advanced Electronic Materials
Article . 2020
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A Silicon Nanowire Ferroelectric Field‐Effect Transistor

Authors: Violetta Sessi; Maik Simon; Halid Mulaosmanovic; Darius Pohl; Markus Loeffler; Tom Mauersberger; Franz P. G. Fengler; +5 Authors

A Silicon Nanowire Ferroelectric Field‐Effect Transistor

Abstract

AbstractThe design and characterization of a Schottky‐type ferroelectric field‐effect transistor based on a nominally undoped silicon nanowire are reported. The nanowire transistor is fabricated by top‐down technology starting from a silicon‐on insulator wafer. A thin ferroelectric Hf0.38Zr0.62O2 layer is integrated via a gate‐first approach. Abrupt Schottky source/drain contacts to the undoped silicon are provided by NiSi2 formation. Two distinct nonvolatile transistor states (programmed and erased) are observed in correspondence to negative and positive polarization in the ferroelectric layer, delivering a memory window of ≈1.5 V and, differently to conventional ferroelectric field effect transistors, yielding an on‐current difference of up to 30%. These results are interpreted as a combination of effects, arising from the proximity of the ferroelectric layer to both the channel and the Schottky‐junction regions. The threshold voltage shift, due to a polarization field acting on the channel, adds up to a polarization field‐driven tuning of the current injection through the Schottky‐source junction. This provides a strategy for manufacturing Schottky‐type nanoscale transistors with the add‐on nonvolatile option, following a complementary metal‐oxide‐semiconductor compatible process. In particular, the device concept is of great interest for achieving nonvolatile polarity modification in reconfigurable field‐effect transistors.

Keywords

HZO, Schottky‐barrier FETs, nonvolatile memory, Physics, QC1-999, ferroelectrics, Electric apparatus and materials. Electric circuits. Electric networks, FeFETs, multigate FETs, TK452-454.4

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
42
Top 10%
Top 10%
Top 10%
gold