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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao HAL Sorbonne Univers...arrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
HAL Sorbonne Université
Article . 2004
Data sources: HAL Sorbonne Université
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Enhanced copper bath monitoring usingelectrochemical impedance spectroscopy

descriptionPublicationkeyboard_double_arrow_right Article 01 Jan 2004 France English
Authors: Zdunek, A.; Sanz, D.N.; Gabrielli, Claude; Mocoteguy, Philippe; Perrot, Hubert; Mace, C.; Quennoy, A.; +1 Authors

Enhanced copper bath monitoring usingelectrochemical impedance spectroscopy

Abstract

Methods are required to monitor the composition and ageing of thechemicals used in copper electroplating baths in order to better guaranteethe quality of the deposited copper. We have used electrochemicalimpedance spectroscopy measurements on copper interconnect depositionbaths in a wafer fab to characterize changes in the condition of those baths.The method is able to clearly distinguish between tools using differentplating chemistries. Results from experiments to monitor multiple processtools indicate the shape of the impedance scan is sensitive to changes in thesteady state of the bath chemistry and may be an indicator of overall bath quality

Country
France
Related Organizations
Keywords

[CHIM] Chemical Sciences, [SPI.TRON] Engineering Sciences [physics]/Electronics

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
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