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Advantage and Challenge of Electrical Critical Dimension Test Structures for Electroplated High Aspect Ratio Nano Structures (HARNS) on Insulating Materials

descriptionPublicationkeyboard_double_arrow_right Article , Conference object 24 Mar 2025Publisher:IEEEJournal:2025 IEEE 37th International Conference on Microelectronic Test Structures (ICMTS)
Authors: Mita, Yoshio; Mizushima, Ayako; Kawai, Noriko; Shinji, Tsuboi; Inoue, Yurie; Ota, Etsuko; Yasunaga, Shun; +5 Authors

doi: 10.1109/icmts63811.2025.11068934

Advantage and Challenge of Electrical Critical Dimension Test Structures for Electroplated High Aspect Ratio Nano Structures (HARNS) on Insulating Materials

Abstract

Electrical Critical Dimension Test Structures (ECD-TS) have been applied for development of new technology: Metallic High Aspect Ratio Nano Structures (Metal-HARNS). The HARNS refer to electro mechanical structures scaled down to submicron width (as narrow as 260nm confirmed) while keeping its thickness (up to 1500nmconfirmed). Two major advantage and challenge have been confirmed through measurement: (1) insulating material showed critical advantage on ECD over Scanning Electron Microscope CD assessment and (2) seed conductive layer affected the measurement as leakage path.

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Keywords

MEMS, [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Electrical Critical Dimension (ECD) High Aspect Ratio Nano Structures MEMS Electroplating, High Aspect Ratio Nano Structures, Electrical Critical Dimension (ECD), Electroplating

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average