Name: COMPOSITION AND STRUCTURE OF THIN METAL FILMS DEPOSITED ON SOLID AND NONRIGID MATERIALS
Keywords: ion-beam-assisted deposition, thin films, metal-containing coatings, тонкие пленки, ионно-лучевое осаждение, rutherford backscattering, металлосодержащие покрытия, резерфордовское обратное рассеяние

descriptionPublicationkeyboard_double_arrow_right Article , Other literature type 01 May 2007Publisher:World Scientific Pub Co Pte LtdJournal:Physics, Chemistry and Application of Nanostructures

Authors: Tashlykov, I. S.; Baraishuk, Sergey Mikhailovich; Veres, O. G.;

doi: 10.1142/9789812770950_0114

COMPOSITION AND STRUCTURE OF THIN METAL FILMS DEPOSITED ON SOLID AND NONRIGID MATERIALS

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ion-beam-assisted deposition, thin films, metal-containing coatings, тонкие пленки, ионно-лучевое осаждение, rutherford backscattering, металлосодержащие покрытия, резерфордовское обратное рассеяние

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