
The physical and technical characteristics, structural and topological aspects of the micromechanical thermo-resistor active heating transdusers synthesis for fluid (gas and liquid) parameters determination are considered. All transducers are based on a single MEMS (Micro Electro Mechanical System) structure and differ in functionality due to different operating modes and different principles for determining fluid parameters. It allows the development of multifunctional sensors based on a single hardware, which includes a typical MEMS structure and mass production microprocessor, for example, PSoC (Programmable System On Chip). The transducers mathematical models acceptable for the COMSOL simulation library and designing of information electronics devices with the registration of various physical parameters are proposed. The analytical calculations on the basis of the proposed models for a gas flow sensor of the temperature dependence from the fluid flow velocity in the MEMS structure was performed. The proposed models can be used for the operation analytical description and computing of devices based on the use of thermoelectric processes in micro-scale structures. Ref. 29, fig. 3.
microelectromechanical system; thermoresistive primary transformer; thermoanemometric and conductometric measurement method, TK7800-8360, thermoresistive primary transduser, термоанемометрические и кондуктометрический метод измерения, мікроелектромеханічна система; терморезистивний первинний перетворювач; термоанемометричний і кон-дуктометричний метод вимірювання, мікроелектромеханічна система, терморезистивний первинний перетворювач, 621.383, Microelectronics, Микроэлектронника, Мікроелектроніка, микроэлектромеханическая система, thermoanemometric and conductometric measurement method, Electronics, микроэлектромеханическая система; терморезистивный первичный преобразователь; термоанемометрические и кондуктометрический метод измерения, microelectromechanical system, термоанемо-метричний і кондуктометричний метод вимірювання, thermoresistive primary transformer, терморезистивный первичный преобразователь
microelectromechanical system; thermoresistive primary transformer; thermoanemometric and conductometric measurement method, TK7800-8360, thermoresistive primary transduser, термоанемометрические и кондуктометрический метод измерения, мікроелектромеханічна система; терморезистивний первинний перетворювач; термоанемометричний і кон-дуктометричний метод вимірювання, мікроелектромеханічна система, терморезистивний первинний перетворювач, 621.383, Microelectronics, Микроэлектронника, Мікроелектроніка, микроэлектромеханическая система, thermoanemometric and conductometric measurement method, Electronics, микроэлектромеханическая система; терморезистивный первичный преобразователь; термоанемометрические и кондуктометрический метод измерения, microelectromechanical system, термоанемо-метричний і кондуктометричний метод вимірювання, thermoresistive primary transformer, терморезистивный первичный преобразователь
| selected citations These citations are derived from selected sources. This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | 0 | |
| popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network. | Average | |
| influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | Average | |
| impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network. | Average |
