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ZENODO
Software . 2026
License: CC BY
Data sources: Datacite
ZENODO
Software . 2026
License: CC BY
Data sources: Datacite
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Direct Replication of Biological Nanostructure Arrays by SEM-to-EBL Pattern Transfer: Application to Cicada Wing Nanopillars

Authors: Celik, Umit;

Direct Replication of Biological Nanostructure Arrays by SEM-to-EBL Pattern Transfer: Application to Cicada Wing Nanopillars

Abstract

We present SEM2DXF, an open-source Python pipeline that converts scanning electron microscope (SEM) images of biological nanostructures into electron-beam lithography (EBL)-ready closed-polygon DXF pattern files, enabling systematic cloning of natural surface architectures. Applied to cicada (Cicada sp.) wing nanopillar arrays imaged at two magnifications — ×19,000 (5.29 nm px−1) and ×50,000 (2.00 nm px−1) — the pipeline automatically detects the SEM annotation band, calibrates the pixel scale from the scale bar, segments individual pillars by a hybrid Hough-circle/contour algorithm, completes truncated boundary features by ellipse fitting, and exports each pillar as a closed-polygon LWPOLYLINE entity in DXF format. Because EBL vector systems fill closed polygons as solid regions, this strategy reduces the number of beam positions by more than 8-fold compared with raster-scan exposure, directly cutting write time. Using ×50,000-derived patterns as the absolute-dimensional reference (individual pillars resolved; D = 115 nm, pitch = 155 nm), we characterise the dose-response of PMMA nanopillar arrays across 16 dose levels (200–700 µC cm−2). Atomic force microscopy (AFM) at eight dose levels provides height measurements and defines a three-dimensional process window (380–490 µC cm−2) that simultaneously optimizes pillar diameter, height (~200 nm), and aspect ratio relative to the cicada reference. Pillar-by-pillar registration of a fabricated array against the biological template (N = 1,174 interior pairs, boundary features excluded) yields a median positional mismatch of 32 nm — less than half the nearest-neighbour pitch — and a mean systematic displacement of (-8, +2) nm, confirming faithful spatial transcription. Manual ImageJ measurements confirm that EBL-fabricated PMMA pillars are approximately cylindrical (top ≈ base ≈ 100–110 nm), whereas cicada pillars are conical (base ~130 nm, top ~50 nm); this intrinsic morphological difference is discussed as an expected consequence of positive-tone resist processing.

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Keywords

electron-beam lithography, cicada wing nanopillars

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
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Average