X-ray Fluorescence Ghost Imaging (XRF-GI) dataset of three wires (one Fe, and two Cu) in a plastic capillary. The capillary contains trace elements like Zn, Zr, etc. The GI scan is presented in the following article 10.1364/OL.499046. A total of 896 GI realizations were taken, organized into 16 vertical translations and 56 horizontal translations of the structuring element (CuSn mask).The dataset contains both the sample transmission images and the masks plus sample transmission images. No images of the masks are provided (they need to be computed). The data is organized in an HDF5 file, under the following structure: dataset_CuSn-mask_3wires.h5 │ ├data │ ├flat_panel │ │ ├dark [float32: 16 × 170 × 350] │ │ ├empty_beam [float32: 170 × 350] │ │ ├sample [float32: 16 × 170 × 350] │ │ └sample_and_masks [float32: 16 × 56 × 170 × 350] │ └xrf [float32: 16 × 56 × 4096] │ └metadata └xrf ├bias_keV [float64: scalar] ├gain_keV [float64: scalar] └ranges ├Ca [int64: 2] ├Cu [int64: 2] ├Fe [int64: 2] ├Si [int64: 2] ├Ti [int64: 2] ├Zn [int64: 2] └Zr [int64: 2] The meaning of the paths is: /data/xrf contains the XRF spectra for each GI realization /data/flat_panel/dark contains the dark images of each scan line (no beam) /data/flat_panel/empty_beam contains the empty beam (no sample & no masks) intensity distribution /data/flat_panel/sample contains the transmission images of the sample at each scan line /data/flat_panel/sample_and_masks contains the transmission images of the sample and masks at each GI realization /metadata/xrf/bias_keV contains the bias in keV of the XRF spectrum /metadata/xrf/gain_keV contains the gain in keV of each XRF energy bin /metadata/xrf/ranges/ contains the bin ranges for interesting Kalpha elemental emission lines in the XRF spectrum For further information we refer to the associated publication. The data can be processed with structured illumination routines of the code at: https://github.com/cicwi/PyCorrectedEmissionCT.