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ZENODO
Dataset . 2023
License: CC BY
Data sources: Datacite
image/svg+xml art designer at PLoS, modified by Wikipedia users Nina, Beao, JakobVoss, and AnonMoos Open Access logo, converted into svg, designed by PLoS. This version with transparent background. http://commons.wikimedia.org/wiki/File:Open_Access_logo_PLoS_white.svg art designer at PLoS, modified by Wikipedia users Nina, Beao, JakobVoss, and AnonMoos http://www.plos.org/
ZENODO
Dataset . 2023
License: CC BY
Data sources: Datacite
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Figures of merit that characterize silicon gate-all-around nanowire FETs affected by line edge roughness variability

Research datakeyboard_double_arrow_right Dataset 24 Feb 2023 English Publisher:Zenodo
Authors: Garcia-Loureiro, Antonio; Seoane, Natalia; Fernandez, Julian G.; Comesaña, Enrique; Pichel, Juan C.;

doi: 10.5281/zenodo.7674908 , 10.5281/zenodo.7674909

Figures of merit that characterize silicon gate-all-around nanowire FETs affected by line edge roughness variability

Abstract

Off-current, threshold voltage, sub-threshold slope and on-current values for two silicon gate-all-around nanowire FETs affected by line edge roughness (LER) variability, a 22 nm gate length device and a 10 nm gate length one. The LER profile that characterizes the roughness deformation is also included in the dataset. Different correlation length (CL) and root mean square (RMS) heights values are characterized.

Work supported by the Spanish MICINN, Xunta de Galicia, and FEDER Funds under Grants PLEC2021-007662, RYC-2017-23312, PID2019-104834GB-I00, ED431F 2020/008 and ED431C 2022/16.

Related Organizations
Keywords

Nanowire, Machine Learning, Line Edge Roughness, Neural Network, Semiconductor, Model regression, Modelling

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popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
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influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
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