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This pilot study was part of the EMPIR (18SIB09) TEMMT project and was registered as the EURAMET 1514 comparison. Therein, different methods for material parameter measurements in the THz spectral range were compared. The different measurement setups included photonic-based (TDS, FDS and TDE), resonant methods and VNA based systems, all of which have unique properties like e.g. spectral coverage. The comparison covered frequency range from approximately 20 GHz up to potentially several THz. The exact frequency range was left open and different systems have different frequency coverage. Part of the study was also to evaluate frequency limits of the different setups. A set of reference materials was measured by as many setups as possible. In addition, the measurements were analyzed with different material parameter extraction methods to study and compare different algorithms.
material characterization, permittivity, measurement uncertainty
material characterization, permittivity, measurement uncertainty
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