We acknowledge funding by the QuantERA project C'MON-QSENS!, the Knut and Alice Wallenberg Foundation through a Wallenberg Academy Fellowship (W.W.), by the Wallenberg Center for Quantum Technology (WACQT, A.C.), by Chalmers Excellence Initiative Nano, and by the Swedish Research Council (Grant no. 2019-04946). Sample fabrication was performed in the Myfab Nanofabrication Laboratory at Chalmers. Simulations were performed on resources provided by the Swedish National Infrastructure for Computing (SNIC) at Tetralith, Link¨oping University, partially funded by the Swedish Research Council (Grant 2018-05973).

We share experimental data for Figs. 2,4,5,6,11,12,13 of arxiv manuscript arXiv:2211.12469 [physics.app-ph] entitled "Micromechanical high-Q trampoline resonators from strained crystalline InGaP for integrated free-space optomechanics".

{"references": ["arXiv:2211.12469"]}