Spectroscopic ellipsometry measurement data obtained from the hydrogenated amorphous diamond-like carbon and silver (DLC:Ag) nanocomposite deposited on quartz (Q) and silicon (Si) substrates. DLC:Ag was deposited employing reactive unbalanced magnetron sputtering in direct current mode using silver target. Process parameters: 80 sccm argon gas flow, 5.4 sccm C2H2 gas flow, 7·10-3 mbar work pressure, 419-422 V or 405 V voltage (sample 139 or 140, respectively), 0.09-0.11 A or 0.09-0.10 A current (sample 139 or 140, respectively), 2 minutes 35 seconds or 2 minutes 32 seconds process duration (sample 139 or 140, respectively). The measurements were carried out at 5 locations on each sample and each substrate. Ellipsometer: rotating compensator GES5-E (Semilab). Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum. Detector: UV-Vis CCD with 0.8 nm resolution. Spectral range: approximately 230-960 nm. Light incidence angles: 50°, 55°, 60°, 65°, 70°, 75°. Light beam size: microspot (365 × 470 μm2 at 75° angle of incidence).

The research was carried out under postdoctoral project "Patterned hybrid multilayer films for optical sensors", No. 1.1.1.2/VIAA/4/20/615.