A brief description of the repository content The data presented here were obtained during an experimental calibration of the Taylor Hobson 130 (Leicester, UK) roundness instrument with the Thorlabs LPS710M (Thorlabs, Newton, NJ, USA) piezo actuator driven by Thorlabs PPC001 Piezo Controller and controlled with Kinesis® (Thorlabs) software. Before the calibration, the piezo actuator itself was calibrated with the Renishaw XL-80 interferometer system (Renishaw, Wotton-under-Edge, UK) along with the Renishaw small optics kit (A-8003-3244). These data are included in the repository as well. Description of the dataset Inside the .zip file, the data obtained with the Renishaw XL-80 laser interferometer and the Taylor Hobson 130 roundness instrument are stored in the “Renishaw_XL-80” and “Taylor_Hobson_130” folders, respectively. Each of these folders contains six subfolders: “0.24um”, “0.75um”, “2.4um”, “7.5um”, “24um”, and “75um”, which include the measurements data obtained with these devices (not simultaneously) while Thorlabs LPS710M piezo actuator was performing displacements simulating a groove pattern. The names of subfolders correspond to the groove’s depth. The data from the measurements performed with the Renishaw XL-80 interferometer were exported with the Laser XL system’s software and are saved with the extension “.RTX”. Two data files are available for each depth being considered that correspond to two measurement series. Inside each file, 40 s recording is stored. Eight grooves should be visible (nominal values: 1.5 s groove width, 3 s distance between subsequent grooves). The data were acquired with a 50 kS/s sampling rate. The data from the measurements performed with the Taylor Hobson 130 roundness instrument were exported with the Ultra® (Taylor Hobson) software and are saved with the extension “.SBF”. 30 data files are available for each depth being considered - 15 files for each of two measurement series. Inside each file, 10 s recording is stored. Two grooves should be visible (nominal values: 1 s groove width, 4 s distance between subsequent grooves). The data were acquired with a 360 S/s sampling rate. Caution: No synchronisation between the piezo actuator and XL-80 interferometer or Taylor Hobson 130 roundness instrument was used. Thus, the first or the last groove within the response to the simulated pattern might be too short to be considered valid. The square excitation of the piezo actuator was used. Thus, ringing oscillations near the grooves’ edges are present. The motion of the piezo actuator might happen to be initiated while the acquisition already had started. Thus, the first response inside each file should be analysed carefully. The piezo actuator did not hold time dependencies properly. The widths of simulated grooves usually differ from their nominal values to some extent. Acknowledgement This dataset was obtained within the 18RP01 ProbeTrace project. This project (18RP01 – ProbeTrace) has received funding from the EMPIR programme co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation programme. Project title: Traceability for contact probe and stylus instrument measurements Funder name: European Metrology Programme for Innovation and Research (EMPIR) Funder ID: 10.13039/100014132 Grant number: 18RP01 ProbeTrace Link to project homepage: http://probetrace.org/