Process simulation-based inventory data (mass and energy balances) for the perovskite single-junction, silicon (PERC architecture), and four-terminal perovskite/silicon tandem solar photovoltaic system life cycles. The file "0 Overview of simulation flowsheets.xlsx" contains images of the 11 flowsheets that constitute the perovskite/silicon tandem simulation model, which encompasses the perovskite single-junction and silicon (PERC) simulation models. For each unit process shown in each of the flowsheet images, the corresponding Excel file in this repository (with the same name) contains the detailed mass and energy balances, as well as full compositions and thermochemical properties of all streams and the compounds in them. That is, streams are not assumed to consist of pure elements simply moving through the system together, but rather taking into account that streams consist of compounds in solution, which have different thermochemical properties than simple mixtures of the elements involved. Nine additional data files, the names of which start with "Inventory - " contain summarized inventory data for the production of 1000 perovskite single-junction, silicon (PERC), and silicon/perovskite tandem PV modules, each with no Si recycling (i.e. zero circularity), 50% Si recycling, and 100% Si recycling (i.e. full Si circularity).